omron EE-SPY801/802 Wafer carrier seated sensor Manual

Update: 01 October, 2023

The EE-SPX 613, EE-SPY 801/802, and EE-SA 801 are wafer carrier landing sensors that are specifically designed to detect the landing position of wafer carriers.

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Brand: OMRON

File format: PDF

Size: 542 KB

MD5 Checksum: AADBADCFA8003276193804B4A20D75CE

Publication date: 14 October, 2011

Downloads: -

PDF Link: omron EE-SPY801/802 Wafer carrier seated sensor Manual PDF